Integrated Process Development in Micro Process Engineering

  • Author:

    N. Kockmann, S. Dreher, R. Wengeler, H. Nirschl, M. Heim, G. Kasper, A. Braun, S. Mall-Gleissle, K. Schaber
  • Source:

    International newsletter on micro-nano integration (2007) 1, 13 - 15